RESUMO
New mobile devices need microphones with a small size, low noise level, reduced cost and high stability respect to variations of temperature and humidity. These characteristics can be obtained using Microelectromechanical Systems (MEMS) microphones, which are substituting for conventional electret condenser microphones (ECM). We present the design and modeling of a capacitive dual-backplate MEMS microphone with a novel circular diaphragm (600 µm diameter and 2.25 µm thickness) supported by fifteen polysilicon springs (2.25 µm thickness). These springs increase the effective area (86.85% of the total area), the linearity and sensitivity of the diaphragm. This design is based on the SUMMiT V fabrication process from Sandia National Laboratories. A lumped element model is obtained to predict the electrical and mechanical behavior of the microphone as a function of the diaphragm dimensions. In addition, models of the finite element method (FEM) are implemented to estimate the resonance frequencies, deflections, and stresses of the diaphragm. The results of the analytical models agree well with those of the FEM models. Applying a bias voltage of 3 V, the designed microphone has a bandwidth from 31 Hz to 27 kHz with 3 dB sensitivity variation, a sensitivity of 34.4 mV/Pa, a pull-in voltage of 6.17 V and a signal to noise ratio of 62 dBA. The results of the proposed microphone performance are suitable for mobile device applications.
RESUMO
Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 µm × 100 µm × 2.25 µm). These actuators are composed by two beam types (2.25 µm thickness) with different cross-section area, which are separated by 2 µm gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V®) process, obtaining a small footprint size (1028 µm × 1028 µm) for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width) and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption.
RESUMO
We present a signal processing system with virtual instrumentation of a MEMS sensor to detect magnetic flux density for biomedical applications. This system consists of a magnetic field sensor, electronic components implemented on a printed circuit board (PCB), a data acquisition (DAQ) card, and a virtual instrument. It allows the development of a semi-portable prototype with the capacity to filter small electromagnetic interference signals through digital signal processing. The virtual instrument includes an algorithm to implement different configurations of infinite impulse response (IIR) filters. The PCB contains a precision instrumentation amplifier, a demodulator, a low-pass filter (LPF) and a buffer with operational amplifier. The proposed prototype is used for real-time non-invasive monitoring of magnetic flux density in the thoracic cage of rats. The response of the rat respiratory magnetogram displays a similar behavior as the rat electromyogram (EMG).
Assuntos
Tecnologia Biomédica/instrumentação , Eletrônica Médica/instrumentação , Magnetometria/instrumentação , Processamento de Sinais Assistido por Computador/instrumentação , Algoritmos , Animais , Tecnologia Biomédica/métodos , Campos Eletromagnéticos , Desenho de Equipamento , Magnetometria/métodos , Masculino , Sistemas Microeletromecânicos , Ratos , Ratos Sprague-Dawley , Respiração , Silício , Tórax/fisiologiaRESUMO
Multilayered microresonators commonly use sensitive coating or piezoelectric layers for detection of mass and gas. Most of these microresonators have a variable cross-section that complicates the prediction of their fundamental resonant frequency (generally of the bending mode) through conventional analytical models. In this paper, we present an analytical model to estimate the first resonant frequency and deflection curve of single-clamped multilayered microresonators with variable cross-section. The analytical model is obtained using the Rayleigh and Macaulay methods, as well as the Euler-Bernoulli beam theory. Our model is applied to two multilayered microresonators with piezoelectric excitation reported in the literature. Both microresonators are composed by layers of seven different materials. The results of our analytical model agree very well with those obtained from finite element models (FEMs) and experimental data. Our analytical model can be used to determine the suitable dimensions of the microresonator's layers in order to obtain a microresonator that operates at a resonant frequency necessary for a particular application.