RESUMEN
Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 µm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.
RESUMEN
This paper focuses on a new type of configuration design of a compliant parallel mechanism (CPM) planar continuum structure and its characteristic analysis of vibration-inherent frequency for planar motion, which can suppress the impact of random vibration in ultra-precision positioning and manufacturing equipment and improve the inherent frequency response of the mechanism. Firstly, a vector-mapping isomorphism between the fully CPM and conventional isomorphic parallel mechanism was constructed with a kinematic differential Jacobian matrix. Then, the mathematical model of topology optimization was put forward considering the compromise programming on the static stiffness and mean vibration-inherent frequency of the mechanism as the design variable and the minimization of compliance as the objective function. A constraint of volume fraction was considered and multi-objective micro displacement mechanism topology optimization based on a prismatic-revolute-revolute (3-PRR) planar nano-positioning continuum structure was performed using the solid isotropic material with penalization (SIMP) technique, which combines the criteria of the optimization algorithm and the vector isomorphic mapping method. Multi-objective topology optimization of the continuum structure micro displacement mechanism was investigated and presented by optimizations with different initial rejection rates. The simulation results show that the stiffness and vibration suppression performance of the continuum structure were improved, whereas the positioning of differential kinematics characteristics of the 3-PRR micro displacement planar fully CPM and isomorphic prototype mechanism retain the same. The modal analysis also provides a rational configuration for the micro displacement mechanism dimensional design and its optimal modal parameters. The crossover oscillation in frequency response of the continuum structure was reduced and quickly converged in the optimization iterations. The performance of the optimized mechanism was verified by the experiments on a planar fully compliant micro displacement continuum structure based on Lead Zirconate Titanate (PZT) actuator.