Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.

Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining

Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining.

Afiliación

Chen T; Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. chent@suda.edu.cn.
Wang Y; Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. 20154229003@stu.suda.edu.cn.
Liu H; Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. hcliu078@suda.edu.cn.
Yang Z; Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. yangzhan@suda.edu.cn.
Wang P; Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. pbwang@suda.edu.cn.
Sun L; Jiangsu Provincial Key Laboratory of Advanced Robotics & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China. lnsun@hit.edu.cn.

Sensors (Basel) ; 17(2)2017 Jan 28.

Article en En | MEDLINE | ID: mdl-28134854

Palabras clave

comb sensor; multi-objective topological optimization; nano-positioning stage

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2017 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza

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