RESUMEN

In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst regimes. The deepest holes were obtained in GHz-burst mode, where we achieved holes of almost 1 mm depth and 35 µm diameter, which corresponds to an aspect ratio of 27, which is higher than the ones reported so far in the literature, to the best of our knowledge. In addition, we study the influence of the energy repartition within the burst in GHz-burst mode.

RESUMEN

We report, for the first time to the best of our knowledge, Bessel beam dielectrics cutting with a femtosecond laser in GHz-burst mode. The non-diffractive beam shaping is based on the use of an axicon and allows for cutting glasses up to 1 mm thickness with an excellent cutting quality. Moreover, we present a comparison of the cutting results with the state-of-the-art method, consisting of short MHz-bursts of femtosecond pulses. We further illustrate the influence of the laser beam parameters such as the burst energy and the pitch between consecutive Bessel beams on the machining quality of the cutting plane and provide process windows for both regimes.

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In this contribution, we present a comparative study on top-down drilling in sodalime glass, with a femtosecond laser operating in single-pulse, MHz-burst and GHz-burst modes, respectively. We investigate the hole depth, drilling rate, and hole morphology for these three regimes while keeping the same experimental conditions. We demonstrate that, for both burst regimes, the burst length has to be adapted for optimizing the hole depth. In the GHz-burst regime, the lower the ablation rate the longer the holes. The three drilling regimes lead to different hole morphologies, where the GHz-burst mode results in the best hole quality featuring glossy inner walls and an almost cylindrical morphology. Furthermore, we obtain crack-free holes, the deepest measuring 3.7 mm in length and 25 µm in entrance diameter corresponding to an aspect ratio of 150, which is the highest aspect ratio reported thus far with femtosecond GHz-burst drilling to the best of our knowledge.

RESUMEN

We present the optimization of a 2.1-µm continuous wave monolithic single-oscillator laser by adapting the Fiber Bragg Grating (FBG) reflected wavelength to the maximum gain wavelength of the Tm3+, Ho3+-codoped fiber. Our study examines the power and spectral evolution of the all-fiber laser and demonstrates that matching these two parameters improves the overall performance of the source.

RESUMEN

The femtosecond GHz-burst mode laser processing has attracted much attention in the last few years. Very recently, the first percussion drilling results obtained in glasses using this new regime were reported. In this study, we present our latest results on top-down drilling in glasses, focusing specifically on the influence of burst duration and shape on the hole drilling rate and the quality of the drilled holes, wherein holes of very high quality with a smooth and glossy inner surface can be obtained. We show that a decreasing energy repartition of the pulses within the burst can increase the drilling rate, but the holes saturate at lower depths and present lower quality than holes drilled with an increasing or flat energy distribution. Moreover, we give an insight into the phenomena that may occur during drilling as a function of the burst shape.

RESUMEN

We report for the first time to our knowledge on top-down percussion drilling of high-quality deep holes in different glasses with femtosecond laser pulses in GHz-burst mode. We reveal the dynamics of the percussion drilling process by pump-probe shadowgraphy and thermal camera imaging demonstrating that the drilling process in GHz-burst mode is fundamentally different from single-pulse processing and confirming the presence of thermal accumulation. Moreover, we show a comparison to drilling by femtosecond single-pulses containing an equal laser fluence in sodalime, alkali-free alumina-borosilicate, fused silica, and sapphire.

RESUMEN

We present a bi-directionally 793-nm diode-pumped Tm3+, Ho3+-codoped silica polarization maintaining double-clad all-fiber laser based on a single-oscillator architecture emitting 195 W at 2.09 µm in continuous wave mode of operation, with a beam quality near the diffraction limit (M2 = 1.08). The power scaling of the laser is only pump-power-limited in the range of the total available pump power (540 W).

RESUMEN

We report on crater formation, line scribing and cavity milling experiments on Silicon, Copper, Aluminum and stainless steel with GHz bursts of femtosecond pulses. The intra-burst repetition rate has been varied between 0.88 and 3.52 GHz, the number of pulses per burst between 50 and 3200, the burst fluence between 8 and 80 J/cm2. For these experiments, a 100-W femtosecond GHz-burst laser has been developed on an industrial laser basis, delivering a total burst energy up to 1 mJ at 100 kHz, with an adjustable number of pulses per burst. The results highlight the conditions to obtain high-ablation efficiency, show how to optimize the machining quality and point out the burst duration as the relevant parameter for femtosecond GHz machining.

RESUMEN

We report on silicon ablation with a 20 W GHz amplified femtosecond laser source. This novel laser delivers burst energies up to 400 µJ, providing flexible intra-pulse repetition rates of 0.88 or 3.52 GHz, up to 200 pulses with ∼350 fs pulse duration. High-efficiency, high-quality ablation can be achieved through optimally determining the number of pulses, intra-pulse repetition, and average pulse energy within a burst. Due to such optimization, we demonstrate a specific ablation rate of 2.5 mm3/min/W with a burst containing 200 pulses at 0.88 GHz, which is the highest one reported so far for fs laser ablation, to the best of our knowledge. GHz ablation is sensitive to the selection of laser parameters. We conceptually discuss the contributions of the pulses within a burst to heat-accumulation-based incubation and material ablation.

RESUMEN

Laser-induced textures have been proven to be excellent solutions for modifying wetting, friction, biocompatibility, and optical properties of solids. The possibility to generate 2D-submicron morphologies by laser processing has been demonstrated recently. Employing double-pulse irradiation, it is possible to control the induced structures and to fabricate novel and more complex 2D-textures. Nevertheless, double-pulse irradiation often implies the use of sophisticated setups for modifying the pulse polarization and temporal profile. Here, we show the generation of homogeneous 2D-LIPSS (laser-induced periodic surface structures) over large areas utilizing a simple array of birefringent crystals. Linearly and circularly polarized pulses were applied, and the optimum process window was defined for both. The results are compared to previous studies, which include a delay line, and the reproducibility between the two techniques is validated. As a result of a systematic study of the process parameters, the obtained morphology was found to depend both on the interplay between fluence and inter-pulse delay, as well as on the number of incident pulses. The obtained structures were characterized via SEM (scanning electron microscopy) and atomic force microscopy. We believe that our results represent a novel approach to surface structuring, primed for introduction in an industrial environment.

RESUMEN

Surface structuring by femtosecond lasers has emerged as an efficient tool to functionalize the surfaces of various solid materials. Laser induced periodic surface structures (LIPSS) can drastically impact the wetting, friction and optical properties of the surface depending on the size, aspect ratio and period of the structures. Morphological characteristics in the nanoscale, such as nano roughness, contributing to a hierarchical surface formation are considered to have a significant impact on those properties. In this study, we demonstrate for the first time to our knowledge the feasibility of inducing ripples and spikes utilizing a 257 nm femtosecond laser. LIPSS with a period smaller than 200 nm were realised. Furthermore, we show the evolution of those structures into conical spikes for this wavelength, and we provide an interpretation on their formation. Finally, we show that sub 200 nm LIPSS can create subwavelength gratings providing non-angular dependent light reflection and non-periodic morphologies showing super hydrophobic behaviour.

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We show, for the first time to our knowledge, the role the heat accumulation plays on the evolution of ultra-short pulse laser-induced surface structures morphology when varying fluence, the number of scans and the repetition rate from 100 kHz up to 2 MHz. We demonstrate how to tailor the size of micro-spikes from nearly ten microns to several tens of microns by a systematic variation of both fluence and overlap. We believe our results will contribute to an in deep understanding of the mechanisms underlying laser surface structuration at high repetition rates.

RESUMEN

A single-oscillator actively Q-switched mode-locked (QML) thulium-doped silica fiber laser is presented and used to pump a ZrF4-BaF2-LaF3-AlF3-NaF (ZBLAN) fiber for mid-infrared (mid-IR) supercontinuum (SC) generation. The fiber laser provided high-peak-power levels directly from the oscillator delivering single mode-locked pulse energies up to 48 µJ, being 2-4 orders of magnitude higher than conventional continuous wave mode-locked lasers. By pumping a ZBLAN fiber specially designed for high-output-power SC generation, 7.8 W have been achieved in all spectral bands with a spectrum extending to 4.2 µm.

RESUMEN

We report on dual-color control of femtosecond direct laser writing (DLW) in a noncommercial silver-containing zinc phosphate glass, thanks to an additional illumination with a cw (continuous wave) UV laser, either after the femtosecond irradiation or simultaneously. By tuning the cw UV power, we demonstrate the tunable control and inhibition of the production efficiency of laser-induced fluorescent silver clusters, leading up to 100% inhibition for simultaneous co-illumination when the laser writing is performed close enough to the permanent structuring threshold. The role of the cw UV illumination is discussed in terms of inhibition of the silver cluster precursors or of dissolution of the laser-induced silver clusters. These results show the ability of laser writing inhibition in our photosensitive silver-containing phosphate glass, which is a necessary step to further develop super-resolution laser writing approaches, such as STED-like DLW, either of fluorescent silver clusters or of silver metallic nanoparticles with plasmonic properties.

RESUMEN

A diode-pumped, actively mode-locked high-power thulium (Tm3+)-doped double-clad silica fiber laser is demonstrated, providing an average output power in mode-locked (continuous wave) operation of 53 W (72 W) with a slope efficiency of 34% (38%). Mode-locking in the 6th-harmonic order was obtained by an acousto-optic modulator driven at 66 MHz without dispersion compensation. The shortest measured output pulse width was 200 ps. Owing to a diffraction grating as cavity end mirror, the central wavelength could be tuned from 1.95 to 2.13 µm. The measured beam quality in mode-locked and continuous wave operation has been close to the diffraction limit.

Asunto(s)

RESUMEN

We demonstrate the first (to our knowledge) quasi-three-level conical refraction laser operating at 2 µm, with 1.6 W of output power at 2074 nm, using a holmium-doped KY(WO4)2 crystal. A maximum slope efficiency of 52% has been achieved, along the optic axis with respect to the absorbed pump power. Furthermore, lasing operation around the optic axis has been performed. In this case, a maximum output power of 3 W has been reached, with a slope efficiency better than 70%, which are the best performances ever reported on this material.