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Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes.
Balage, Pierre; Lafargue, Manon; Guilberteau, Théo; Bonamis, Guillaume; Hönninger, Clemens; Lopez, John; Manek-Hönninger, Inka.
Afiliación
  • Balage P; Université de Bordeaux-CNRS-CEA, CELIA UMR 5107, 33405 Talence, France.
  • Lafargue M; Université de Bordeaux-CNRS-CEA, CELIA UMR 5107, 33405 Talence, France.
  • Guilberteau T; AMPLITUDE, Cité de la Photonique, 33600 Pessac, France.
  • Bonamis G; Université de Bordeaux-CNRS-CEA, CELIA UMR 5107, 33405 Talence, France.
  • Hönninger C; ALPhANOV, Rue François Mitterrand, 33400 Talence, France.
  • Lopez J; AMPLITUDE, Cité de la Photonique, 33600 Pessac, France.
  • Manek-Hönninger I; AMPLITUDE, Cité de la Photonique, 33600 Pessac, France.
Micromachines (Basel) ; 15(5)2024 May 09.
Article en En | MEDLINE | ID: mdl-38793205
ABSTRACT
In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as well as in different MHz- and GHz-burst regimes. The deepest holes were obtained in GHz-burst mode, where we achieved holes of almost 1 mm depth and 35 µm diameter, which corresponds to an aspect ratio of 27, which is higher than the ones reported so far in the literature, to the best of our knowledge. In addition, we study the influence of the energy repartition within the burst in GHz-burst mode.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2024 Tipo del documento: Article País de afiliación: Francia Pais de publicación: Suiza
Texto completo
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Imprimir
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2024 Tipo del documento: Article País de afiliación: Francia Pais de publicación: Suiza