Your browser doesn't support javascript.
loading
Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications.
García-Ramírez, Mario Alberto; González-Reynoso, Orfil; Bello-Jiménez, Miguel Angel; Vargas-Rodríguez, Everado.
Afiliação
  • García-Ramírez MA; Electronics Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, Mexico.
  • González-Reynoso O; Chemistry Engineering Department, Research Centre for Applied Science and Engineering, Universidad de Guadalajara, Blvd. Marcelino García Barragán 1421, Guadalajara 44430, Mexico.
  • Bello-Jiménez MA; Departamento de Estudios Multidisciplinarios, División Campus Irapuato-Salamanca, Universidad de Guanajuato, Av. Universidad s/n, Col. Yacatitas, Yuriria, Guanajuato 38940, Mexico.
  • Vargas-Rodríguez E; Instituto de Investigación en Comunicación Óptica (IICO), Universidad Autónoma de San Luis Potosí, Av. Karakorum No. 1470 Lomas 4a Secc., San Luis Potosí 78210, Mexico.
Sensors (Basel) ; 22(5)2022 Feb 25.
Article em En | MEDLINE | ID: mdl-35270953
In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics.
Assuntos
Palavras-chave
Texto completo
Adicionar na Minha BVS
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Semicondutores / DNA Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: México País de publicação: Suíça
Texto completo
Adicionar na Minha BVS
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Semicondutores / DNA Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: México País de publicação: Suíça