Polarization conversion from highly conducting, asymmetric trapezoidal gratings.
Appl Opt
; 42(19): 3742-4, 2003 Jul 01.
Article
em En
| MEDLINE
| ID: mdl-12868808
The differences in the curves of the zeroth-order cross-polarization reflection coeffients (p --> s and s --> p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p --> s and s --> p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Appl Opt
Ano de publicação:
2003
Tipo de documento:
Article
País de afiliação:
Argentina
País de publicação:
Estados Unidos