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Rubidium and Cesium Ion-Induced Electron and Ion Signals for Scanning Ion Microscopy Applications.
Li, Yang; Xu, Sheng; Loeber, Thomas H; Vredenbregt, Edgar J D.
Afiliación
  • Li Y; Department of Applied Physics and Science Education, Eindhoven University of Technology (TU/e), P.O. Box 513, Eindhoven 5600 MB, The Netherlands.
  • Xu S; Department of Applied Physics and Science Education, Eindhoven University of Technology (TU/e), P.O. Box 513, Eindhoven 5600 MB, The Netherlands.
  • Loeber TH; College of Engineering and Applied Sciences (CEAS), Nanjing University, 163 Xianlin Avenue, Nanjing 210023, China.
  • Vredenbregt EJD; Nano Structuring Center (NSC), Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau (RPTU), P.O. Box 3049, Kaiserslautern D-67653, Germany.
Microsc Microanal ; 30(5): 817-824, 2024 Nov 04.
Article en En | MEDLINE | ID: mdl-39255067
ABSTRACT
Scanning ion microscopy applications of novel focused ion beam (FIB) systems based on ultracold rubidium (Rb) and cesium (Cs) atoms were investigated via ion-induced electron and ion yields. Results measured on the Rb+ and Cs+ FIB systems were compared with results from commercially available gallium (Ga+) FIB systems to verify the merits of applying Rb+ and Cs+ for imaging. The comparison shows that Rb+ and Cs+ have higher secondary electron (SE) yields on a variety of pure element targets than Ga+, which implies a higher signal-to-noise ratio can be achieved for the same dose in SE imaging using Rb+/Cs+ than Ga+. In addition, analysis of the ion-induced ion signals reveals that secondary ions dominate Cs+ induced ion signals while the Rb+/Ga+ induced signals contain more backscattered ions.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsc Microanal Año: 2024 Tipo del documento: Article País de afiliación: Países Bajos Pais de publicación: Reino Unido
Texto completo
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XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsc Microanal Año: 2024 Tipo del documento: Article País de afiliación: Países Bajos Pais de publicación: Reino Unido