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Add-On Device Powered by Parallelized Adsorption Traps for Preconcentrator-GC-MS Measurement of sub-pmol/mol Levels of NF3.
Lim, Jeong Sik; Yoon, Doohyun; Kim, Taewan; Lee, Jinbok.
Afiliación
  • Lim JS; Precision Measurement, University of Science and Technology (UST), Gajeong-ro 217, Yuseong-gu, Daejeon 34113, Republic of Korea.
  • Yoon D; Semiconductor and Display Metrology Group, Korea Research Institute of Standards and Science (KRISS), Gajeong-ro 267, Yuseong-gu, Daejeon 34113, Republic of Korea.
  • Kim T; Precision Measurement, University of Science and Technology (UST), Gajeong-ro 217, Yuseong-gu, Daejeon 34113, Republic of Korea.
  • Lee J; Semiconductor and Display Metrology Group, Korea Research Institute of Standards and Science (KRISS), Gajeong-ro 267, Yuseong-gu, Daejeon 34113, Republic of Korea.
ACS Omega ; 9(35): 37225-37230, 2024 Sep 03.
Article en En | MEDLINE | ID: mdl-39246486
ABSTRACT
In this study, an add-on preconcentration device powered by parallelized pretraps (PPTs) was utilized to measure the sub-pmol/mol levels of NF3 in N2. The add-on preconcentrator was coupled to the detachable trap preconcentrator (DTP) with a gas chromatograph-mass spectrometer [Anal. Chem. 2019, 91, 3342-3349]. The breakthrough volume of the parallel configuration was found to be substantially higher than that of the serial configuration with the same amount of adsorbent (HayeSep D). Liquid oxygen (LO2) cooling (-183 °C) exhibited better preconcentration performance for NF3 in N2 compared to NF3 in air (N2 + O2) with liquid nitrogen cooling (-195 °C) and NF3 in air with LO2 cooling. The DTP unit was essential to discriminate residual species, such as N2, O2, CO2, and CF4, of which the preconcentrated portion in the PPT can be excessive, enabling the overwhelm filtering capability of the quadrupole mass spectrometer. The limit of detection of NF3 in N2 of the PPT/DTP/gas chromatograph-mass spectrometer was 0.01 ppt, which is significantly better than that determined without using the add-on preconcentration device (0.21 ppt).

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Omega Año: 2024 Tipo del documento: Article Pais de publicación: Estados Unidos

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Omega Año: 2024 Tipo del documento: Article Pais de publicación: Estados Unidos