Your browser doesn't support javascript.
loading
Suppression of Transverse Modes in 50°YX-LiTaO3/SiO2/Si POI SAW Resonator with Groove Configuration.
Li, Menghui; Qi, Mengke; Chen, Yuanhang; Cheng, Yimin; Cao, Liang; Mu, Xiaojing.
Afiliación
  • Li M; The Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, Chongqing University, Chongqing 400044, China.
  • Qi M; The International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
  • Chen Y; The Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, Chongqing University, Chongqing 400044, China.
  • Cheng Y; The International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
  • Cao L; The Key Laboratory of Optoelectronic Technology and Systems of Ministry of Education, Chongqing University, Chongqing 400044, China.
  • Mu X; The International Research and Development Center of Micro-Nano Systems and New Materials Technology, Chongqing University, Chongqing 400044, China.
ACS Appl Mater Interfaces ; 16(35): 46872-46878, 2024 Sep 04.
Article en En | MEDLINE | ID: mdl-39172985
ABSTRACT
With the rapid development of mobile communication technology, the POI (piezoelectric on insulator) structure has gained recognition in the field of RF filtering. However, transverse modes remain in the passband of corresponding surface acoustic wave (SAW) devices, which impedes their application in crowded spectra. This article introduces a groove configuration to suppress transverse modes for POI SAW resonators employing a 50°YX-LiTaO3/SiO2/Si multilayered structure. First, the response of conventional POI SAW resonators was calculated by the 3D periodic FEM method, and the results indicate that transverse modes caused by energy leakage to busbar regions are serious in POI SAW resonators. Then, the groove configuration was adopted to confine energy within the aperture region by reducing the velocity at the end of IDT electrodes, and the groove dimension was optimized to achieve a nearly spurious-free response in the passband. Finally, experimental results of fabricated one-port SAW resonators with optimal groove configuration were provided to validate the suppression of transverse modes and the enhancement of the Q factor in the POI SAW resonator.
Palabras clave
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2024 Tipo del documento: Article País de afiliación: China Pais de publicación: Estados Unidos
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2024 Tipo del documento: Article País de afiliación: China Pais de publicación: Estados Unidos