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Mapping Ferroelectric Fields Reveals the Origins of the Coercivity Distribution.
Chan, Ho Leung; Fields, Shelby S; Chen, Yueyun; O'Neill, Tristan P; Lenox, Megan K; Hubbard, William A; Ihlefeld, Jon F; Regan, Brian C.
Afiliación
  • Chan HL; Department of Physics and Astronomy, University of California, Los Angeles, California 90095, United States.
  • Fields SS; California NanoSystems Institute, University of California, Los Angeles, California 90095, United States.
  • Chen Y; Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
  • O'Neill TP; Department of Physics and Astronomy, University of California, Los Angeles, California 90095, United States.
  • Lenox MK; California NanoSystems Institute, University of California, Los Angeles, California 90095, United States.
  • Hubbard WA; Department of Physics and Astronomy, University of California, Los Angeles, California 90095, United States.
  • Ihlefeld JF; California NanoSystems Institute, University of California, Los Angeles, California 90095, United States.
  • Regan BC; Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904, United States.
ACS Nano ; 2024 Jul 17.
Article en En | MEDLINE | ID: mdl-39017620
ABSTRACT
Better techniques for imaging ferroelectric polarization would aid the development of new ferroelectrics and the refinement of old ones. Here we show how scanning transmission electron microscope (STEM) electron beam-induced current (EBIC) imaging reveals ferroelectric polarization with obvious, simply interpretable contrast. Planar imaging of an entire ferroelectric hafnium zirconium oxide (Hf0.5Zr0.5O2, HZO) capacitor shows an EBIC response that is linearly related to the polarization determined in situ with the positive-up, negative-down (PUND) method. The contrast is easily calibrated in MV/cm. The underlying mechanism is magnification-independent, operating equally well on micrometer-sized devices and individual nanoscale domains. Coercive-field mapping reveals that individual domains are biased "positive" and "negative", as opposed to being "easy" and "hard" to switch. The remanent background E-fields generating this bias can be isolated and mapped. Coupled with STEM's native capabilities for structural identification, STEM EBIC imaging provides a revolutionary tool for characterizing ferroelectric materials and devices.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Nano Año: 2024 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Nano Año: 2024 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos