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Monolithic integrated optoelectronic chip for vector force detection.
Feng, Jiansong; Wang, Zhongqi; Zhanghu, Mengyuan; Zhang, Xu; Shen, Yong; Yang, Jing; Li, Zhibin; Chen, Bin; Wang, Taihong; Chen, Xiaolong; Liu, Zhaojun.
Afiliación
  • Feng J; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Wang Z; Department of Electrical and Electronic Engineering, The University of Hong Kong, Hong Kong, China.
  • Zhanghu M; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Zhang X; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Shen Y; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Yang J; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Li Z; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Chen B; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Wang T; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Chen X; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
  • Liu Z; Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen, 518055 China.
Microsyst Nanoeng ; 10: 85, 2024.
Article en En | MEDLINE | ID: mdl-38915831
ABSTRACT
Sensors with a small footprint and real-time detection capabilities are crucial in robotic surgery and smart wearable equipment. Reducing device footprint while maintaining its high performance is a major challenge and a significant limitation to their development. Here, we proposed a monolithic integrated micro-scale sensor, which can be used for vector force detection. This sensor combines an optical source, four photodetectors, and a hemispherical silicone elastomer component on the same sapphire-based AlGaInP wafer. The chip-scale optical coupling is achieved by employing the laser lift-off techniques and the flip-chip bonding to a processed sapphire substrate. This hemispherical structure device can detect normal and shear forces as low as 1 mN within a measurement range of 0-220 mN for normal force and 0-15 mN for shear force. After packaging, the sensor is capable of detecting forces over a broader range, with measurement capabilities extending up to 10 N for normal forces and 0.2 N for shear forces. It has an accuracy of detecting a minimum normal force of 25 mN and a minimum shear force of 20 mN. Furthermore, this sensor has been validated to have a compact footprint of approximately 1.5 mm2, while maintaining high real-time response. We also demonstrate its promising potential by combining this sensor with fine surface texture perception in the fields of compact medical robot interaction and wearable devices.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsyst Nanoeng Año: 2024 Tipo del documento: Article Pais de publicación: Reino Unido
Texto completo
Añadir a Mi BVS
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PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsyst Nanoeng Año: 2024 Tipo del documento: Article Pais de publicación: Reino Unido