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Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO3 Thin Film.
Liu, Yushuai; Liu, Kangfu; Li, Jiawei; Li, Yang; Wu, Tao.
Afiliación
  • Liu Y; School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.
  • Liu K; Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
  • Li J; University of Chinese Academy of Sciences, Beijing 100864, China.
  • Li Y; School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.
  • Wu T; Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.
Micromachines (Basel) ; 15(4)2024 Mar 30.
Article en En | MEDLINE | ID: mdl-38675288
ABSTRACT
This article presents lithium niobate (LiNbO3) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO3 thin film. The spurious-free SH0 resonator achieves an electromechanical coupling coefficient (kt2) of 42.67% and a quality factor (Qr) of 254 at the wave-propagating orientation of 0° in the 36Y-cut plane.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2024 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza
Texto completo
Añadir a Mi BVS
Imprimir
XML
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2024 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza