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Carbon-Rich Plasma-Deposited Silicon Oxycarbonitride Films Derived from 4-(Trimethylsilyl)morpholine as a Novel Single-Source Precursor.
Ermakova, Evgeniya; Tsyrendorzhieva, Irina; Mareev, Alexander; Pavlov, Dmitry; Maslova, Olga; Shayapov, Vladimir; Maksimovskiy, Eugene; Yushina, Irina; Kosinova, Marina.
Afiliación
  • Ermakova E; Nikolaev Institute of Inorganic Chemistry, SB RAS, 3 Acad. Lavrentiev Ave, Novosibirsk, 630090, Russia.
  • Tsyrendorzhieva I; Favorsky Irkutsk Institute of Chemistry, SB RAS, 1 Favorskogo str., Irkutsk, 664033, Russia.
  • Mareev A; Favorsky Irkutsk Institute of Chemistry, SB RAS, 1 Favorskogo str., Irkutsk, 664033, Russia.
  • Pavlov D; Favorsky Irkutsk Institute of Chemistry, SB RAS, 1 Favorskogo str., Irkutsk, 664033, Russia.
  • Maslova O; Nikolaev Institute of Inorganic Chemistry, SB RAS, 3 Acad. Lavrentiev Ave, Novosibirsk, 630090, Russia.
  • Shayapov V; Nikolaev Institute of Inorganic Chemistry, SB RAS, 3 Acad. Lavrentiev Ave, Novosibirsk, 630090, Russia.
  • Maksimovskiy E; Nikolaev Institute of Inorganic Chemistry, SB RAS, 3 Acad. Lavrentiev Ave, Novosibirsk, 630090, Russia.
  • Yushina I; Nikolaev Institute of Inorganic Chemistry, SB RAS, 3 Acad. Lavrentiev Ave, Novosibirsk, 630090, Russia.
  • Kosinova M; Nikolaev Institute of Inorganic Chemistry, SB RAS, 3 Acad. Lavrentiev Ave, Novosibirsk, 630090, Russia.
Chempluschem ; 89(8): e202400094, 2024 Aug.
Article en En | MEDLINE | ID: mdl-38659085
ABSTRACT
4-(trimethylsilyl)morpholine O(CH2CH2)2NSi(CH3)3 (TMSM) was investigated as a single-source precursor for SiCNO films synthesis. Optical emission spectroscopy of plasma generated from TMSM/He, TMSM/H2, and TMSM/NH3 gas mixtures revealed the presence of N2, CH, H, CN, and CO species. The last two are suggested to be responsible for the lowering of carbon concentration in the films in comparison with the precursor. The refractive index ranged from 1.5 to 2.0, and bandgap varied from 2.0 to 4.6 eV, which pointed that some of the films can be used as antireflective coatings in silicon photovoltaic cell technologies and dielectric layers in electronic devices.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Chempluschem Año: 2024 Tipo del documento: Article País de afiliación: Rusia Pais de publicación: Alemania
Texto completo
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XML
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Chempluschem Año: 2024 Tipo del documento: Article País de afiliación: Rusia Pais de publicación: Alemania