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Fabricating Ultra-Narrow Precision Slit Structures with Periodically Reducing Current Over-Growth Electroforming.
Yang, Xiaohong; Zhang, Xinmin; Ming, Pingmei; Li, Yuntao; Wang, Wei; Zhang, Yunyan; Li, Zongbin; Li, Lunxu; Xiao, Youping; Guo, Xiaoyi; Yang, Zheng.
Afiliación
  • Yang X; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Zhang X; School of Engineering and Technology, Henan University of Technology, Hebi 458030, China.
  • Ming P; School of Mechanical and Electronic Engineering, Hebi Polytechnic, Hebi 458030, China.
  • Li Y; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Wang W; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Zhang Y; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Li Z; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Li L; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Xiao Y; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Guo X; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
  • Yang Z; School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454003, China.
Micromachines (Basel) ; 15(1)2023 Dec 29.
Article en En | MEDLINE | ID: mdl-38258195
ABSTRACT
An ultra-narrow precision slit with a width of less than ten micrometers is the key structure of some optical components, but the fabrication of these structures is still very difficult to accomplish. To fabricate these slits, this paper proposed a periodically reducing current over-growth electroforming process. In the periodically reducing current over-growth electroforming, the electric current applied to the electrodeposition process is periodically stepped down rather than being constant. Simulations and experimentation studies were carried out to verify the feasibility of the proposed process, and further optimization of process parameters was implemented experimentally to achieve the desired ultra-narrow precision slits. The current values were I1=Iinitial, I2=0.75Iinitial at Qc=0.5Qt, I3=0.5Iinitial at Qc=0.75Qt,respectively. It was shown that, compared with conventional constant current over-growth electroforming, the proposed process can significantly improve the surface quality and geometrical accuracy of the fabricated slits and can markedly enhance the achievement of the formed ultra-narrow slits. With the proposed process, slits with a width of down to 5 ± 0.1 µm and a surface roughness of less than 62.8 nm can be easily achieved. This can improve the determination sensitivity and linear range of the calibration curves of spectral imagers and food and chemical analysis instruments. Periodically reducing current over-growth electroforming is effective and advantageous in fabricating ultra-narrow precision slits.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza