High-Precision Positioning Stage Control Based on a Modified Disturbance Observer.
Sensors (Basel)
; 24(2)2024 Jan 17.
Article
en En
| MEDLINE
| ID: mdl-38257683
ABSTRACT
High-precision positioning systems play a crucial role in various industrial applications. This study focuses on improving the performance of a high-precision multi-degrees-of-freedom (DOF) stage. In terms of the controller design, the following two key challenges must be addressed the cross-decoupling of different DOFs and the impact of external disturbances. To address these problems, a self-tuning approach is proposed for simultaneous decoupling and disturbance suppression. Initially, the stage undergoes static decoupling using a data-based approach, facilitating feedback control for each DOF through single-input, single-output controllers. Addressing dynamic coupling and external disturbance challenges, we introduced a comprehensive evaluation index and a self-tuning multi-input, multi-output disturbance observer. This approach enabled the evaluation and optimization of the disturbance compensation for all DOFs, ensuring optimal positioning accuracy. Finally, we tested the proposed method using a high-precision multi-DOF stage with a real-time control platform. The results demonstrated a significant reduction in the standard deviations of positioning errors in the rx, ry, and z directions by 46%, 58%, and 6%, respectively. The approach used in this study opens avenues for advancements in the design and control of complex multi-DOF systems.
Texto completo:
1
Colección:
01-internacional
Base de datos:
MEDLINE
Idioma:
En
Revista:
Sensors (Basel)
Año:
2024
Tipo del documento:
Article
País de afiliación:
China
Pais de publicación:
Suiza