High-speed plasma measurements with a plasma impedance probe.
Rev Sci Instrum
; 94(8)2023 Aug 01.
Article
en En
| MEDLINE
| ID: mdl-38065161
Plasma impedance probes (PIPs) are a type of RF probe that primarily measures electron density. This work introduces two advancements: a streamlined analytical model for interpreting PIP-monopole measurements and techniques for achieving ≥1 MHz time-resolved PIP measurements. The model's improvements include introducing sheath thickness as a measurement and providing a more accurate method for measuring electron density and damping. The model is validated by a quasi-static numerical simulation, which compares the simulation with measurements, identifies sources of error, and provides probe design criteria for minimizing uncertainty. The improved time resolution is achieved by introducing higher-frequency hardware, updated analysis algorithms, and a more rigorous approach to RF calibration. Finally, the new model and high-speed techniques are applied to two datasets: a 4 kHz plasma density oscillation resolved at 100 kHz with densities ranging between 2 × 1014 and 3 × 1015 m-3, and a 150 kHz oscillation resolved at 4 MHz with densities ranging between 4 × 1014 and 6 × 1014 m-3.
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01-internacional
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MEDLINE
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En
Revista:
Rev Sci Instrum
Año:
2023
Tipo del documento:
Article
Pais de publicación:
Estados Unidos