Ultrasensitive Acoustic Detection Using an Enlarged Fabry-Perot Cavity with a Graphene Diaphragm.

Liu, Yang; Li, Cheng; Li, Buxuan; Lu, Shanshan; Fan, Shangchun; Dong, Shuxuan; Wan, Zhen; Shen, Mengxian

Liu, Yang; Li, Cheng; Li, Buxuan; Lu, Shanshan; Fan, Shangchun; Dong, Shuxuan; Wan, Zhen; Shen, Mengxian.

Afiliación

Liu Y; School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China.
Li C; School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China.
Li B; Shenzhen Institute of Beihang University, Shenzhen 518063, China.
Lu S; Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States.
Fan S; School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China.
Dong S; School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China.
Wan Z; School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China.
Shen M; School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China.

ACS Appl Mater Interfaces ; 2023 Oct 26.

Article en En | MEDLINE | ID: mdl-37883526

Palabras clave

F−P acoustic sensor; enlarged backing air cavity; graphene; speech detection; ultrahigh sensitivity

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Asunto de la revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Año: 2023 Tipo del documento: Article País de afiliación: China Pais de publicación: Estados Unidos

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