Preparation of High-Quality Samples for MEMS-Based In-Situ (S)TEM Experiments.

Srot, Vesna; Straubinger, Rainer; Predel, Felicitas; van Aken, Peter A

Srot, Vesna; Straubinger, Rainer; Predel, Felicitas; van Aken, Peter A.

Afiliación

Srot V; Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany.
Straubinger R; Protochips Inc., Morrisville, NC, USA.
Predel F; Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany.
van Aken PA; Max Planck Institute for Solid State Research, Stuttgart Center for Electron Microscopy, Stuttgart, Germany.

Microsc Microanal ; 29(2): 596-605, 2023 Apr 05.

Article en En | MEDLINE | ID: mdl-37749724

RESUMEN

A novel focused ion beam (FIB)-based methodology for the preparation of clean and artifact-free specimens on micro-electro-mechanical-system (MEMS)-based chips for in-situ electrical and electro-thermal experiments in a (scanning) transmission electron microscope ((S)TEM) is introduced. Owing to an alternative geometry, the lamellae are attached to a MEMS-based chip directly after the lift-out procedure and afterward further treated or thinned to electron transparency. The quality of produced lamellae on a chip resembles the quality of a classical FIB-prepared sample that is here demonstrated by high-resolution STEM imaging and analytical techniques. Various sample preparation parameters and the performance of in-situ prepared samples have been evaluated through electrical-biasing experiments.

Palabras clave

in-situ TEM; FIB; MEMS chips; electrical-biasing; sample preparation

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsc Microanal Año: 2023 Tipo del documento: Article País de afiliación: Alemania Pais de publicación: Reino Unido

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