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Synthesis of Few-Layered Transition-Metal Dichalcogenides by Ion Implantation of Chalcogen and Metal Species into Sapphire.
Bude, Romain; Verschueren, Ivan; Florea, Ileana; Maurice, Jean-Luc; Legagneux, Pierre; Pereira, Lino M C; Bana, Harsh; Villarreal, Renan; Blume, Raoul; Knop-Gericke, Axel; Jones, Travis; Pribat, Didier.
Afiliación
  • Bude R; Laboratoire de Physique des Couches Minces et des Interfaces, Ecole Polytechnique, Palaiseau Cedex 91128, France.
  • Verschueren I; Laboratoire de Physique des Couches Minces et des Interfaces, Ecole Polytechnique, Palaiseau Cedex 91128, France.
  • Florea I; Thales Research & Technology, 1, Avenue Augustin Fresnel, Palaiseau Cedex 91767, France.
  • Maurice JL; Laboratoire de Physique des Couches Minces et des Interfaces, Ecole Polytechnique, Palaiseau Cedex 91128, France.
  • Legagneux P; Laboratoire de Physique des Couches Minces et des Interfaces, Ecole Polytechnique, Palaiseau Cedex 91128, France.
  • Pereira LMC; Thales Research & Technology, 1, Avenue Augustin Fresnel, Palaiseau Cedex 91767, France.
  • Bana H; KU Leuven, Quantum Solid State Physics, Leuven 3001, Belgium.
  • Villarreal R; KU Leuven, Quantum Solid State Physics, Leuven 3001, Belgium.
  • Blume R; KU Leuven, Quantum Solid State Physics, Leuven 3001, Belgium.
  • Knop-Gericke A; Max-Planck-Institut für Chemische Energiekonversion, Postfach 101365, Mülheim an der Ruhr 45413, Germany.
  • Jones T; Max-Planck-Institut für Chemische Energiekonversion, Postfach 101365, Mülheim an der Ruhr 45413, Germany.
  • Pribat D; Department of Inorganic Chemistry, Fritz-Haber-Institut der Max-PlanckGesellschaft, Faradayweg 4-6, Berlin 14195, Germany.
ACS Omega ; 8(32): 29475-29484, 2023 Aug 15.
Article en En | MEDLINE | ID: mdl-37599956
The growth of transition-metal dichalcogenides (TMDCs) has been performed so far using most established thin-film growth techniques (e.g., vapor phase transport, chemical vapor deposition, molecular beam epitaxy, etc.). However, because there exists no self-limiting mechanism for the growth of TMDCs, none of these techniques allows precise control of the number of TMDC layers over large substrate areas. Here, we explore the ion implantation of the parent TMDC atoms into a chemically neutral substrate for the synthesis of TMDC films. The idea is that once all of the ion-implanted species have reacted together, the synthesis reaction stops, thereby effectively stopping growth. In other words, even if there is no self-limiting mechanism, growth stops when the nutrients are exhausted. We have co-implanted Mo and S ions into c-oriented sapphire substrates using various doses corresponding to 1- to 5-layer atom counts. We find that the subsurface region of the sapphire substrates is amorphized by the ion implantation process, at least for implanted doses of 2-layer atom counts and over. For all doses, we have observed the formation of MoS2 material inside the sapphire after postimplantation annealing between 800 and 850 °C. We report that the order of implantation (i.e., whether S or Mo is implanted first) is an important parameter. More precisely, samples for which S is implanted first tend to yield thin crystals with a large lateral extension (more than 200 nm for 5-layer doses) and mainly located at the interface between the amorphized and crystalline sapphire. When Mo is first implanted, the MoS2 crystals still predominantly appear at the amorphous-crystalline interface (which is much rougher), but they are much thicker, suggesting a different nucleation mechanism.

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Omega Año: 2023 Tipo del documento: Article País de afiliación: Francia Pais de publicación: Estados Unidos

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Omega Año: 2023 Tipo del documento: Article País de afiliación: Francia Pais de publicación: Estados Unidos