Positioning System of Infrared Sensors Based on ZnO Thin Film.

Tsai, Chia-Yu; Lin, Yan-Wen; Ku, Hong-Ming; Lee, Chia-Yen

Tsai, Chia-Yu; Lin, Yan-Wen; Ku, Hong-Ming; Lee, Chia-Yen.

Afiliación

Tsai CY; Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan.
Lin YW; Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan.
Ku HM; Department of Chemical Engineering, King Mongkut's University of Technology Thonburi, Bangkok 10140, Thailand.
Lee CY; Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan.

Sensors (Basel) ; 23(15)2023 Jul 31.

Article en En | MEDLINE | ID: mdl-37571600

Palabras clave

MEMS; positioning system; pyroelectric infrared sensors; zinc oxide

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Taiwán Pais de publicación: Suiza

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