Recent Trends in Structures and Interfaces of MEMS Transducers for Audio Applications: A Review.

Gemelli, Alessandro; Tambussi, Marco; Fusetto, Samuele; Aprile, Antonio; Moisello, Elisabetta; Bonizzoni, Edoardo; Malcovati, Piero

Gemelli, Alessandro; Tambussi, Marco; Fusetto, Samuele; Aprile, Antonio; Moisello, Elisabetta; Bonizzoni, Edoardo; Malcovati, Piero.

Afiliación

Gemelli A; Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.
Tambussi M; Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.
Fusetto S; Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.
Aprile A; Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.
Moisello E; Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.
Bonizzoni E; Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.
Malcovati P; Department of Electrical, Computer and Biomedical Engineering, University of Pavia, 27100 Pavia, Italy.

Micromachines (Basel) ; 14(4)2023 Apr 14.

Article en En | MEDLINE | ID: mdl-37421080

Palabras clave

ICs; MEMS; electromagnetic; electrostatic; interfaces; microphones; piezoelectric; speakers; structures; trends

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Italia Pais de publicación: Suiza

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