Laser Interference Lithography-A Method for the Fabrication of Controlled Periodic Structures.

Liu, Ri; Cao, Liang; Liu, Dongdong; Wang, Lu; Saeed, Sadaf; Wang, Zuobin

Liu, Ri; Cao, Liang; Liu, Dongdong; Wang, Lu; Saeed, Sadaf; Wang, Zuobin.

Afiliación

Liu R; International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, China.
Cao L; Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute, Changchun University of Science and Technology, Zhongshan 528437, China.
Liu D; Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun 130022, China.
Wang L; International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun 130022, China.
Saeed S; Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute, Changchun University of Science and Technology, Zhongshan 528437, China.
Wang Z; Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun 130022, China.

Nanomaterials (Basel) ; 13(12)2023 Jun 07.

Article en En | MEDLINE | ID: mdl-37368248

Palabras clave

laser interference lithography; laser materials processing; micro/nanostructuring; periodic structure; surface functionalization

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Año: 2023 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza

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