Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators.

Linden, John; Melech, Neta; Sakaev, Igor; Fogel, Ofer; Krylov, Slava; Nuttman, David; Zalevsky, Zeev; Sirota, Marina

Linden, John; Melech, Neta; Sakaev, Igor; Fogel, Ofer; Krylov, Slava; Nuttman, David; Zalevsky, Zeev; Sirota, Marina.

Afiliación

Linden J; Department of Engineering, Bar Ilan University, Ramat Gan, Israel.
Melech N; Research and Incubation, ERC, KLA, Yavne, Israel.
Sakaev I; School of Mechanical Engineering, Faculty of Engineering, Tel-Aviv University, Tel Aviv, Israel.
Fogel O; Research and Incubation, ERC, KLA, Yavne, Israel.
Krylov S; Research and Incubation, ERC, KLA, Yavne, Israel.
Nuttman D; School of Mechanical Engineering, Faculty of Engineering, Tel-Aviv University, Tel Aviv, Israel.
Zalevsky Z; Engineering Department, TAMAM, IAI, Yehud, Israel.
Sirota M; Department of Engineering, Bar Ilan University, Ramat Gan, Israel.

Microsyst Nanoeng ; 9: 38, 2023.

Article en En | MEDLINE | ID: mdl-37007607

Palabras clave

Electrical and electronic engineering; NEMS; Structural properties

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsyst Nanoeng Año: 2023 Tipo del documento: Article País de afiliación: Israel Pais de publicación: Reino Unido

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