Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope.

Wang, Shihe; Chen, Jianlin; Tsukamoto, Takashiro; Tanaka, Shuji

Wang, Shihe; Chen, Jianlin; Tsukamoto, Takashiro; Tanaka, Shuji.

Afiliación

Wang S; Department of Robotics, Tohoku University, Sendai 9808579, Japan.
Chen J; Department of Robotics, Tohoku University, Sendai 9808579, Japan.
Tsukamoto T; School of Microelectronics, Shanghai University, Shanghai 201800, China.
Tanaka S; Department of Robotics, Tohoku University, Sendai 9808579, Japan.

Sensors (Basel) ; 23(6)2023 Mar 08.

Article en En | MEDLINE | ID: mdl-36991650

Palabras clave

(100) single crystal silicon; disk resonator; elliptic spoke; frequency mismatch; mode matched resonator; multi-ring structure

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Suiza

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