Microfabrication of functional polyimide films and microstructures for flexible MEMS applications.

Dong, Zihao; He, Qipei; Shen, Dawei; Gong, Zheng; Zhang, Deyuan; Zhang, Wenqiang; Ono, Takahito; Jiang, Yonggang

Dong, Zihao; He, Qipei; Shen, Dawei; Gong, Zheng; Zhang, Deyuan; Zhang, Wenqiang; Ono, Takahito; Jiang, Yonggang.

Afiliación

Dong Z; Institute of Bionic and Micronano Systems, School of Mechanical Engineering and Automation, Beihang University, Beijing, 100191 China.
He Q; Institute of Bionic and Micronano Systems, School of Mechanical Engineering and Automation, Beihang University, Beijing, 100191 China.
Shen D; Institute of Bionic and Micronano Systems, School of Mechanical Engineering and Automation, Beihang University, Beijing, 100191 China.
Gong Z; Institute of Bionic and Micronano Systems, School of Mechanical Engineering and Automation, Beihang University, Beijing, 100191 China.
Zhang D; Institute of Bionic and Micronano Systems, School of Mechanical Engineering and Automation, Beihang University, Beijing, 100191 China.
Zhang W; College of Engineering, China Agricultural University, Beijing, 100083 China.
Ono T; Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8579 Japan.
Jiang Y; Institute of Bionic and Micronano Systems, School of Mechanical Engineering and Automation, Beihang University, Beijing, 100191 China.

Microsyst Nanoeng ; 9: 31, 2023.

Article en En | MEDLINE | ID: mdl-36969964

Palabras clave

Electronic properties and materials; NEMS

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Microsyst Nanoeng Año: 2023 Tipo del documento: Article Pais de publicación: Reino Unido

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