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Process Controlled Ruthenium on 2D Engineered V-MXene via Atomic Layer Deposition for Human Healthcare Monitoring.
Mohapatra, Debananda; Shin, Yujin; Ansari, Mohd Zahid; Kim, Youn-Hye; Park, Ye Jin; Cheon, Taehoon; Kim, Haekyoung; Lee, Jung Woo; Kim, Soo-Hyun.
Afiliación
  • Mohapatra D; School of Materials Science and Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, 38541, Republic of Korea.
  • Shin Y; Department of Materials Science and Engineering, Pusan National University, Geumjeong-gu, Busan, 46241, Republic of Korea.
  • Ansari MZ; School of Materials Science and Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, 38541, Republic of Korea.
  • Kim YH; School of Materials Science and Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, 38541, Republic of Korea.
  • Park YJ; School of Materials Science and Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, 38541, Republic of Korea.
  • Cheon T; Center for Core Research Facilities, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Sang-ri, Hyeonpung-myeon, Dalseong-gun, Daegu, 711-873, Republic of Korea.
  • Kim H; School of Materials Science and Engineering, Yeungnam University, Gyeongsan, Gyeongbuk, 38541, Republic of Korea.
  • Lee JW; Department of Materials Science and Engineering, Pusan National University, Geumjeong-gu, Busan, 46241, Republic of Korea.
  • Kim SH; Graduate School of Semiconductor Materials and Devices Engineering, Ulsan National Institute of Science and Technology (UNIST), Ulju-gun, Ulsan, 44919, Republic of Korea.
Adv Sci (Weinh) ; 10(12): e2206355, 2023 04.
Article en En | MEDLINE | ID: mdl-36814343
In searching for unique and unexplored 2D materials, the authors try to investigate for the very first time the use of delaminated V-MXene coupled with precious metal ruthenium (Ru) through atomic layer deposition (ALD) for various contact and noncontact mode of real-time temperature sensing applications at the human-machine interface. The novel delaminated V-MXene (DM-V2 CTx ) engineered ruthenium-ALD (Ru-ALD) temperature sensor demonstrates a competitive sensing performance of 1.11% °C-1 as of only V-MXene of 0.42% °C-1 . A nearly threefold increase in sensing and reversibility performance linked to the highly ordered few-layered V-MXene and selective, well-controlled Ru atomic doping by ALD for the successful formation of Ru@DM-V2 CTX heterostructure. The advanced heterostructure formation, the mechanism, and the role of Ru have been comprehensively investigated by ultra-high-resolution transmission/scanning transmission electron microscopies coupled with next-generation spherical aberration correction technology and fast, accurate elemental mapping quantifications, also by ultraviolet photoelectron spectroscopy. To the knowledge, this work is the first to use the novel, optimally processed V-MXene over conventionally used Ti-MXene and its surface-internal structure engineering by Ru-ALD process-based temperature-sensing devices function and operational demonstrations. The current work could potentially motivate the development of multifunctional, future, next-generation, safe, personal healthcare electronic devices by the industrially scalable ALD technique.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Rutenio Límite: Humans Idioma: En Revista: Adv Sci (Weinh) Año: 2023 Tipo del documento: Article Pais de publicación: Alemania

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Rutenio Límite: Humans Idioma: En Revista: Adv Sci (Weinh) Año: 2023 Tipo del documento: Article Pais de publicación: Alemania