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A compound Kinoform/Fresnel zone plate lens with 15 nm resolution and high efficiency in soft x-ray.
Tong, Xujie; Chen, Yifang; Mu, Chengyang; Chen, Qiucheng; Zhang, Xiangzhi; Zeng, Guang; Li, Yuchun; Xu, Zijian; Zhao, Jun; Zhen, Xiangjun; Mao, Chengwen; Lu, Hongliang; Tai, Renzhong.
Afiliación
  • Tong X; Nanolithography and Application Research Group, School of Information Science and Technology, Fudan University, Shanghai 200433, People's Republic of China.
  • Chen Y; Nanolithography and Application Research Group, School of Information Science and Technology, Fudan University, Shanghai 200433, People's Republic of China.
  • Mu C; Nanolithography and Application Research Group, School of Information Science and Technology, Fudan University, Shanghai 200433, People's Republic of China.
  • Chen Q; Nanolithography and Application Research Group, School of Information Science and Technology, Fudan University, Shanghai 200433, People's Republic of China.
  • Zhang X; Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, People's Republic of China.
  • Zeng G; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent, Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China.
  • Li Y; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent, Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China.
  • Xu Z; Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, People's Republic of China.
  • Zhao J; Nanolithography and Application Research Group, School of Information Science and Technology, Fudan University, Shanghai 200433, People's Republic of China.
  • Zhen X; Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, People's Republic of China.
  • Mao C; Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, People's Republic of China.
  • Lu H; Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai 201210, People's Republic of China.
  • Tai R; State Key Laboratory of ASIC and System, Shanghai Institute of Intelligent, Electronics & Systems, School of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China.
Nanotechnology ; 34(21)2023 Mar 07.
Article en En | MEDLINE | ID: mdl-36745920
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Nanotechnology Año: 2023 Tipo del documento: Article Pais de publicación: Reino Unido
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Nanotechnology Año: 2023 Tipo del documento: Article Pais de publicación: Reino Unido