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SnO2-Based Ultra-Flexible Humidity/Respiratory Sensor for Analysis of Human Breath.
Deb, Moumita; Chen, Mei-Yu; Chang, Po-Yi; Li, Pin-Hsuan; Chan, Ming-Jen; Tian, Ya-Chung; Yeh, Ping-Hung; Soppera, Olivier; Zan, Hsiao-Wen.
Afiliación
  • Deb M; Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30010, Taiwan.
  • Chen MY; Department of Photonics, College of Electrical and Computer Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30010, Taiwan.
  • Chang PY; Department of Physics, Tamkang University, 151, Yingzhuan Rd., Tamsui, New Taipei City 25137, Taiwan.
  • Li PH; Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30010, Taiwan.
  • Chan MJ; Department of Photonics, College of Electrical and Computer Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30010, Taiwan.
  • Tian YC; Université de Haute-Alsace, CNRS, IS2M UMR 7361, F-68100 Mulhouse, France.
  • Yeh PH; Université de Strasbourg, F-67081 Strasbourg, France.
  • Soppera O; Department of Photonics, College of Electrical and Computer Engineering, National Yang Ming Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30010, Taiwan.
  • Zan HW; Department of Photonics, College of Electrical and Computer Engineering, National Chiao Tung University, 1001 Ta Hsueh Rd., Hsinchu 30010, Taiwan.
Biosensors (Basel) ; 13(1)2023 Jan 03.
Article en En | MEDLINE | ID: mdl-36671916
Developing ultraflexible sensors using metal oxides is challenging due to the high-temperature annealing step in the fabrication process. Here, we demonstrate the ultraflexible relative humidity (RH) sensor on food plastic wrap by using 808 nm near-infrared (NIR) laser annealing for 1 min at a low temperature (26.2-40.8 °C). The wettability of plastic wraps coated with sol-gel solution is modulated to obtain uniform films. The surface morphology, local temperature, and electrical properties of the SnO2 resistor under NIR laser irradiation with a power of 16, 33, and 84 W/cm2 are investigated. The optimal device can detect wide-range RH from 15% to 70% with small incremental changes (0.1-2.2%). X-ray photoelectron spectroscopy reveals the relation between the surface binding condition and sensing response. Finally, the proposed sensor is attached onto the face mask to analyze the real-time human breath pattern in slow, normal, and fast modes, showing potential in wearable electronics or respiration monitoring.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Óxidos / Electrónica Límite: Humans Idioma: En Revista: Biosensors (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Taiwán Pais de publicación: Suiza
Texto completo
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Imprimir
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PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Óxidos / Electrónica Límite: Humans Idioma: En Revista: Biosensors (Basel) Año: 2023 Tipo del documento: Article País de afiliación: Taiwán Pais de publicación: Suiza