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Miniaturized CO2 Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector.
Ng, Doris Keh Ting; Xu, Linfang; Chen, Weiguo; Wang, Huanhuan; Gu, Zhonghua; Chia, Xavier Xujie; Fu, Yuan Hsing; Jaafar, Norhanani; Ho, Chong Pei; Zhang, Tantan; Zhang, Qingxin; Lee, Lennon Yao Ting.
Afiliación
  • Ng DKT; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Xu L; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Chen W; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Wang H; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Gu Z; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Chia XX; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Fu YH; Photonics Devices and Systems Group, Engineering Product Development, Singapore University of Technology and Design, 8 Somapah Road, Singapore 487372, Singapore.
  • Jaafar N; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Ho CP; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Zhang T; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Zhang Q; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
  • Lee LYT; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore.
ACS Sens ; 7(8): 2345-2357, 2022 Aug 26.
Article en En | MEDLINE | ID: mdl-35943904
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Sens Año: 2022 Tipo del documento: Article País de afiliación: Singapur Pais de publicación: Estados Unidos
Texto completo
Añadir a Mi BVS
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XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: ACS Sens Año: 2022 Tipo del documento: Article País de afiliación: Singapur Pais de publicación: Estados Unidos