Your browser doesn't support javascript.
loading
Built-In Packaging for Single Terminal Devices.
Gulsaran, Ahmet; Bastug Azer, Bersu; Kocer, Samed; Rahmanian, Sasan; Saritas, Resul; Abdel-Rahman, Eihab M; Yavuz, Mustafa.
Afiliación
  • Gulsaran A; Mechanical and Mechatronics Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada.
  • Bastug Azer B; Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada.
  • Kocer S; Mechanical and Mechatronics Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada.
  • Rahmanian S; Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada.
  • Saritas R; Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada.
  • Abdel-Rahman EM; Systems Design Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada.
  • Yavuz M; Systems Design Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada.
Sensors (Basel) ; 22(14)2022 Jul 14.
Article en En | MEDLINE | ID: mdl-35890942
An alternative packaging method, termed built-in packaging, is proposed for single terminal devices, and demonstrated with an actuator application. Built-in packaging removes the requirements of wire bonding, chip carrier, PCB, probe station, interconnection elements, and even wires to drive single terminal devices. Reducing these needs simplifies operation and eliminates possible noise sources. A micro resonator device is fabricated and built-in packaged for demonstration with electrostatic actuation and optical measurement. Identical actuation performances are achieved with the most conventional packaging method, wire bonding. The proposed method offers a compact and cheap packaging for industrial and academic applications.
Palabras clave
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Canadá Pais de publicación: Suiza
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Canadá Pais de publicación: Suiza