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Discharge characteristics of steady-state high-density plasma source based on cascade arc discharge with hollow cathode.
Yamasaki, K; Yanagi, O; Sunada, Y; Hatta, K; Shigesada, R; Sumino, M; Yamaguchi, T; Islam, Md Anwarul; Tamura, N; Okuno, H; Namba, S.
Afiliación
  • Yamasaki K; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Yanagi O; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Sunada Y; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Hatta K; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Shigesada R; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Sumino M; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Yamaguchi T; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Islam MA; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
  • Tamura N; Deptartment of Helical Plasma Research, National Institute for Fusion Science, 322-6 Oroshi-cyo, Toki, Gifu 509-5292, Japan.
  • Okuno H; Nishina Center for Accelerator-Based Science, RIKEN, Wako, Saitama 351-0198, Japan.
  • Namba S; Graduate School of Advanced Science and Engineering, Hiroshima University, 1-4-1, Kagamiyama, Higashi-hiroshima, Hiroshima 739-8527, Japan.
Rev Sci Instrum ; 93(5): 053502, 2022 May 01.
Article en En | MEDLINE | ID: mdl-35649751
We developed a steady-state high-density plasma source by applying a hollow cathode to a cascade arc discharge device. The hollow cathode is made of a thermionic material (LaB6) to facilitate plasma production inside it. The cascade arc discharge device with the hollow cathode produced a stationary plasma with an electron density of about 1016 cm-3. It was found that the plasma source produces a strong pressure gradient between the gas feed and the vacuum chamber. The plasma source separated the atmospheric pressure (100 kPa) and a vacuum (100 Pa) when the discharge was performed with an argon gas flow rate of 5.0 l/min and a discharge current of 40 A. An analysis of the pressure gradient along the plasma source showed that the pressure difference between the gas feed and the vacuum chamber can be well described by the Hagen-Poiseuille flow equation, indicating that the viscosity of the neutral gas is the dominant factor for producing this pressure gradient. A potential profile analysis suggested that the plasma was mainly heated within cylindrical channels whose inner diameter was 3 mm. This feature and the results of the pressure ratio analysis indicated that the temperature, and, thus, viscosity, of the neutral gas increased with the increasing number of intermediate electrodes. The discharge characteristics and shape of the hollow cathode are suitable for plasma window applications.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2022 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Estados Unidos
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Rev Sci Instrum Año: 2022 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Estados Unidos