Formation of mononuclear N,O-chelate zirconium complexes by direct insertion of epoxide into tetrakis(dimethylamido)zirconium: highly promising approach for developing an ALD precursor of ZrO<sub>2</sub> thin films.

Jiang, Jianwei; Choi, Sohee; Oh, Jaehyun; Choi, Jihyun; Sun, Ho-Jung; Yoon, Sungho

Formation of mononuclear N,O-chelate zirconium complexes by direct insertion of epoxide into tetrakis(dimethylamido)zirconium: highly promising approach for developing an ALD precursor of ZrO₂ thin films.

Jiang, Jianwei; Choi, Sohee; Oh, Jaehyun; Choi, Jihyun; Sun, Ho-Jung; Yoon, Sungho.

Afiliación

Jiang J; Department of Chemistry, Chung-Ang University, Seoul 06974, Republic of Korea. sunghoyoon@cau.ac.kr.
Choi S; Department of Chemistry, Chung-Ang University, Seoul 06974, Republic of Korea. sunghoyoon@cau.ac.kr.
Oh J; Department of Materials Science and Engineering, Kunsan National University, Kunsan 573-701, Republic of Korea. hjsun@kunsan.ac.kr.
Choi J; Department of Chemistry, Chung-Ang University, Seoul 06974, Republic of Korea. sunghoyoon@cau.ac.kr.
Sun HJ; Department of Materials Science and Engineering, Kunsan National University, Kunsan 573-701, Republic of Korea. hjsun@kunsan.ac.kr.
Yoon S; Department of Chemistry, Chung-Ang University, Seoul 06974, Republic of Korea. sunghoyoon@cau.ac.kr.

Dalton Trans ; 51(13): 5315-5321, 2022 Mar 29.

Article en En | MEDLINE | ID: mdl-35293395

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Dalton Trans Asunto de la revista: QUIMICA Año: 2022 Tipo del documento: Article Pais de publicación: Reino Unido

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