MoS2 hybrid integrated micro-ring resonator phase shifter based on a silicon nitride platform.
Opt Lett
; 47(4): 949-952, 2022 Feb 15.
Article
en En
| MEDLINE
| ID: mdl-35167566
We demonstrate a low-power, compact micro-ring phase shifter based on hybrid integration with atomically thin two-dimensional layered materials, and experimentally establish a low-loss silicon nitride platform. Using a wet transfer method, a large-area few-layer MoS2 film is hybrid integrated with a micro-ring phase shifter, leading to a tuning efficiency of 5.8 pm V-1 at a center wavelength of 1545.294â
nm and a half-wave-voltage-length product as low as 0.09â
V cm. Our device is designed to provide a hybrid-integration-based active phase modulation scheme for integrated optical communication networks with large-cross-section silicon nitride waveguides.
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MEDLINE
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En
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Opt Lett
Año:
2022
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Article
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Estados Unidos