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Construction and Characterization of TiN/Si3N4 Composite Insulation Layer in TiN/Si3N4/Ni80Cr20 Thin Film Cutting Force Sensor.
Ma, Ruyuan; Wu, Wenge; He, Zhenyu; Cheng, Yunping; Liu, Lijuan; Zhao, Yongjuan.
Afiliación
  • Ma R; School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
  • Wu W; School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
  • He Z; School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
  • Cheng Y; School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
  • Liu L; School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
  • Zhao Y; School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
Micromachines (Basel) ; 12(12)2021 Nov 29.
Article en En | MEDLINE | ID: mdl-34945326
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2021 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza
Texto completo
Añadir a Mi BVS
Imprimir
XML
PubMed Links
Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2021 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza