Multi-Foci Division of Nonlinear Energy Absorption on Ultrashort Pulse Laser Singulation of Sapphire Wafers.

Lye, Celescia Siew Mun; Wang, Zhongke; Lam, Yee Cheong

Lye, Celescia Siew Mun; Wang, Zhongke; Lam, Yee Cheong.

Afiliación

Lye CSM; SIMTech-NTU Joint Laboratory (Precision Machining), Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.
Wang Z; School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.
Lam YC; SIMTech-NTU Joint Laboratory (Precision Machining), Nanyang Technological University, 50 Nanyang Avenue, Singapore 639798, Singapore.

Micromachines (Basel) ; 12(11)2021 Oct 28.

Article en En | MEDLINE | ID: mdl-34832740

Palabras clave

multi-foci laser micro processing; pulse energy division; sapphire wafer singulation; spatial proximity of foci; surface morphology

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2021 Tipo del documento: Article País de afiliación: Singapur Pais de publicación: Suiza

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