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Electric field-induced crystallization of ferroelectric hafnium zirconium oxide.
Lederer, Maximilian; Abdulazhanov, Sukhrob; Olivo, Ricardo; Lehninger, David; Kämpfe, Thomas; Seidel, Konrad; Eng, Lukas M.
Afiliación
  • Lederer M; Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109, Dresden, Germany. maximilian.lederer@ipms.fraunhofer.de.
  • Abdulazhanov S; Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109, Dresden, Germany.
  • Olivo R; Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109, Dresden, Germany.
  • Lehninger D; Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109, Dresden, Germany.
  • Kämpfe T; Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109, Dresden, Germany.
  • Seidel K; Fraunhofer IPMS, Center Nanoelectronic Technologies, 01109, Dresden, Germany.
  • Eng LM; Institut für Angewandte Physik, Technische Universität Dresden, 01062, Dresden, Germany.
Sci Rep ; 11(1): 22266, 2021 Nov 15.
Article en En | MEDLINE | ID: mdl-34782687
Ferroelectricity in crystalline hafnium oxide thin films is strongly investigated for the application in non-volatile memories, sensors and other applications. Especially for back-end-of-line (BEoL) integration the decrease of crystallization temperature is of major importance. However, an alternative method for inducing ferroelectricity in amorphous or semi-crystalline hafnium zirconium oxide films is presented here, using the newly discovered effect of electric field-induced crystallization in hafnium oxide films. When applying this method, an outstanding remanent polarization value of 2P[Formula: see text] = 47 [Formula: see text]C/cm[Formula: see text] is achieved for a 5 nm thin film. Besides the influence of Zr content on the film crystallinity, the reliability of films crystallized with this effect is explored, highlighting the controlled crystallization, excellent endurance and long-term retention.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sci Rep Año: 2021 Tipo del documento: Article País de afiliación: Alemania Pais de publicación: Reino Unido
Texto completo
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sci Rep Año: 2021 Tipo del documento: Article País de afiliación: Alemania Pais de publicación: Reino Unido