Ultrafast Silicon Nanomembrane Microbolometer for Long-Wavelength Infrared Light Detection.

Chen, Chen; Li, Cheng; Min, Seunghwan; Guo, Qiushi; Xia, Zhenyang; Liu, Dong; Ma, Zhenqiang; Xia, Fengnian

Chen, Chen; Li, Cheng; Min, Seunghwan; Guo, Qiushi; Xia, Zhenyang; Liu, Dong; Ma, Zhenqiang; Xia, Fengnian.

Afiliación

Chen C; Department of Electrical Engineering, Yale University, New Haven, Connecticut 06511, United States.
Li C; Department of Electrical Engineering, Yale University, New Haven, Connecticut 06511, United States.
Min S; Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States.
Guo Q; Department of Electrical Engineering, Yale University, New Haven, Connecticut 06511, United States.
Xia Z; Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States.
Liu D; Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States.
Ma Z; Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, Wisconsin 53706, United States.
Xia F; Department of Electrical Engineering, Yale University, New Haven, Connecticut 06511, United States.

Nano Lett ; 21(19): 8385-8392, 2021 10 13.

Article en En | MEDLINE | ID: mdl-34606292

Asunto(s)

Semiconductores; Silicio; Rayos Infrarrojos; Óxidos

Palabras clave

Long-wavelength infrared detection; high-speed; microbolometer; silicon nanomembrane

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Asunto principal: Semiconductores / Silicio Tipo de estudio: Diagnostic_studies Idioma: En Revista: Nano Lett Año: 2021 Tipo del documento: Article País de afiliación: Estados Unidos Pais de publicación: Estados Unidos

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