Analysis of Optical Diffraction Profiles Created by Phase-Modulating MEMS Micromirror Arrays.

Mohammad, Tarek; He, Siyuan; Mrad, Ridha Ben

Mohammad, Tarek; He, Siyuan; Mrad, Ridha Ben.

Afiliación

Mohammad T; Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON M5S 3G8, Canada.
He S; Department of Mechanical and Industrial Engineering, Ryerson University, Toronto, ON M5B 2K3, Canada.
Mrad RB; Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON M5S 3G8, Canada.

Micromachines (Basel) ; 12(8)2021 Jul 28.

Article en En | MEDLINE | ID: mdl-34442511

Palabras clave

diffractive optics; light steering; micromirror arrays; optical phase control; spatial light modulator; surface micromachining

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Micromachines (Basel) Año: 2021 Tipo del documento: Article País de afiliación: Canadá Pais de publicación: Suiza

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