Study of the Absorption of Electromagnetic Radiation by 3D, Vacuum-Packaged, Nano-Machined CMOS Transistors for Uncooled IR Sensing.

Cherniak, Gil; Avraham, Moshe; Bar-Lev, Sharon; Golan, Gady; Nemirovsky, Yael

Cherniak, Gil; Avraham, Moshe; Bar-Lev, Sharon; Golan, Gady; Nemirovsky, Yael.

Afiliación

Cherniak G; Electrical Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel.
Avraham M; Electrical Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel.
Bar-Lev S; Department of Electrical Engineering and Electronics, Ariel University, Ariel 40700, Israel.
Golan G; Electrical Engineering Department, Technion-Israel Institute of Technology, Haifa 32000, Israel.
Nemirovsky Y; Department of Electrical Engineering and Electronics, Ariel University, Ariel 40700, Israel.

Micromachines (Basel) ; 12(5)2021 May 16.

Article en En | MEDLINE | ID: mdl-34065752

Palabras clave

TMOS sensor; finite difference time domain; optical and electromagnetics simulations; thermal sensors

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2021 Tipo del documento: Article País de afiliación: Israel Pais de publicación: Suiza

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