Deformation Behavior of Various Interconnection Structures Using Fine Pitch Microelectromechanical Systems (MEMS) Vertical Probe.

Luc Le, Xuan; Eul Lee, Han; Choa, Sung-Hoon

Luc Le, Xuan; Eul Lee, Han; Choa, Sung-Hoon.

Afiliación

Luc Le X; Graduate School of Nano IT Design Fusion, Seoul National University of Science and Technology, Seoul, 01811, Republic of Korea.
Eul Lee H; Department of Manufacturing Systems and Design Engineering, Seoul National University of Science and Technology, Seoul, 01811, Republic of Korea.
Choa SH; Graduate School of Nano IT Design Fusion, Seoul National University of Science and Technology, Seoul, 01811, Republic of Korea.

J Nanosci Nanotechnol ; 21(5): 2949-2958, 2021 May 01.

Article en En | MEDLINE | ID: mdl-33653465

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: J Nanosci Nanotechnol Año: 2021 Tipo del documento: Article Pais de publicación: Estados Unidos

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