A ppm Ethanol Sensor Based on Fabry-Perot Interferometric Surface Stress Transducer at Room Temperature.

Takahashi, Toshiaki; Choi, Yong-Joon; Sawada, Kazuaki; Takahashi, Kazuhiro

Takahashi, Toshiaki; Choi, Yong-Joon; Sawada, Kazuaki; Takahashi, Kazuhiro.

Afiliación

Takahashi T; Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan.
Choi YJ; Japan Society for the Promotion of Science, Tokyo 102-0083, Japan.
Sawada K; Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan.
Takahashi K; Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan.

Sensors (Basel) ; 20(23)2020 Nov 30.

Article en En | MEDLINE | ID: mdl-33266348

Palabras clave

chemical sensing; ethanol; fabryperot interference; film transfer technique; microelectromechanical systems; optical interferometry; surface stress sensor; volatile organic compounds

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2020 Tipo del documento: Article País de afiliación: Japón Pais de publicación: Suiza

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