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Innovative Method Using Adhesive Force for Surface Micromachining of Carbon Nanowall.
Choi, Hyeokjoo; Kwon, Seokhun; Lee, Seokwon; Kim, Yonghyeon; Kang, Hyunil Kang Jung Hyun; Kim, Jung Hyun; Choi, Wonseok.
Afiliación
  • Choi H; Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea.
  • Kwon S; Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea.
  • Lee S; Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea.
  • Kim Y; Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Korea.
  • Kang HKJH; Department of Electrical Engineering, Hanbat National University, Daejeon 34158, Korea.
  • Kim JH; Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Korea.
  • Choi W; Department of Advanced Materials Engineering, Hanbat National University, Daejeon 34158, Korea.
Nanomaterials (Basel) ; 10(10)2020 Oct 06.
Article en En | MEDLINE | ID: mdl-33036269
 The application of a carbon nanowall (CNW) via transfer is very demanding due to the unusual structure of vertically grown wall-shaped that easily collapses. In addition, direct growth on a device cannot obtain a precision-patterned shape because of the temperature limit of the photoresist (PR). Therefore, in this paper, we demonstrate a new CNW surface micromachining technology capable of direct growth. In order to reduce unexpected damage caused by chemical etching, a physical force was used to etch with the adhesive properties of CNWs that have low adhesion to silicon wafer. To prevent compositing with PR, the CNW was surface modified using oxygen plasma. Since there is a risk of surface-modified CNW (SMCNW) collapse in an ultrasonic treatment, which is a physical force, the CNW was coated with PR. After etching the SMCNW grown on PR uncoated area, PR was lifted off using an acetone solution. The effect on the SMCNW by the lift-off process was investigated. The surface, chemical, and structural properties of PR-removed SMCNW and pristine-SMCNW were compared and showed a minimal difference. Therefore, the CNW surface micromachining technique was considered successful.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Año: 2020 Tipo del documento: Article Pais de publicación: Suiza
Texto completo
Añadir a Mi BVS
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Nanomaterials (Basel) Año: 2020 Tipo del documento: Article Pais de publicación: Suiza