The perpendicular magnetic anisotropy (PMA) and the interfacial Dzyaloshinskii-Moriya interaction (iDMI) are investigated in as grown and 300 °C annealed Co-based ultrathin systems. For this, Co films of various thicknesses (0.8 nm ⩽ t Co ⩽ 5.7 nm) were deposited by magnetron sputtering on thermally oxidized Si substrates using Pt, W, Ir, Ti, Ru and MgO buffer or/and capping layers. X-ray diffraction was used to investigate their structural properties and vibrating sample magnetometry (VSM) was used to determine the magnetic dead layer thickness and the magnetization at saturation (M s). VSM revealed that the M s for the Pt and the Ir buffered and capped films is the largest. Microstrip line ferromagnetic resonance (MS-FMR), used to extract the gyromagnetic ratio of the thicker Co films, revealed the existence of a second order PMA term, which is thickness dependent. Brillouin light scattering (BLS) in the Damon-Eshbach configuration was used to investigate the thickness dependence of the iDMI effective constant from the spin wave vector dependence of the frequency difference between Stokes and anti-Stokes lines. BLS and MS-FMR techniques were combined to measure the spin wave frequency variation as a function of the in-plane applied magnetic field (where the second order PMA contribution vanishes). The thickness dependence of the effective magnetization was then deduced and used to investigate PMA. For all the systems, PMA results from interface and volume contributions that we determined. The largest interface PMA constants were obtained for Pt- and Ir-based systems due to the electron hybridization of Co with these heavy metals having high spin orbit coupling. Annealing at 300 °C increases both the interface PMA and iDMI for the Pt/Co/MgO most probably due to de-mixing of interpenetrating oxygen atoms from the Co layer and the formation of a sharp Co/O interface.