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Microstructure and Optical Properties of E-Beam Evaporated Zinc Oxide Films-Effects of Decomposition and Surface Desorption.
Skowronski, Lukasz; Ciesielski, Arkadiusz; Olszewska, Aleksandra; Szczesny, Robert; Naparty, Mieczyslaw; Trzcinski, Marek; Bukaluk, Antoni.
Afiliación
  • Skowronski L; Institute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, Poland.
  • Ciesielski A; Faculty of Physics, University of Warsaw, Pasteura 5, 02-093 Warsaw, Poland.
  • Olszewska A; Institute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, Poland.
  • Szczesny R; Faculty of Chemistry, Nicolaus Copernicus University in Torun, Gagarina 7, 87-100 Torun, Poland.
  • Naparty M; Institute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, Poland.
  • Trzcinski M; Institute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, Poland.
  • Bukaluk A; Institute of Mathematics and Physics, UTP University of Science and Technology, Kaliskiego 7, 85-796 Bydgoszcz, Poland.
Materials (Basel) ; 13(16)2020 Aug 09.
Article en En | MEDLINE | ID: mdl-32784875
Zinc oxide films have been fabricated by the electron beam physical vapour deposition (PVD) technique. The effect of substrate temperature during fabrication and annealing temperature (carried out in ultra high vacuum conditions) has been investigated by means of atomic force microscopy, scanning electron microscopy, powder X-ray diffraction, X-ray photoelectron spectroscopy and spectroscopic ellipsometry. It was found that the layer deposited at room temperature is composed of Zn and ZnO crystallites with a number of orientations, whereas those grown at 100 and 200 ∘C consist of ZnO grains and exhibit privileged growth direction. Presented results clearly show the influence of ZnO decomposition and segregation of Zn atoms during evaporation and post-deposition annealing on microstructure and optical properties of zinc oxide films.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Materials (Basel) Año: 2020 Tipo del documento: Article País de afiliación: Polonia Pais de publicación: Suiza
Texto completo
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Materials (Basel) Año: 2020 Tipo del documento: Article País de afiliación: Polonia Pais de publicación: Suiza