Enhancement of Withstand Voltage in Silicon Strain Gauges Using a Thin Alkali-Free Glass.

Kim, Joon Hyub; Han, Ji-Hoon; Park, Chan Won; Min, Nam Ki

Kim, Joon Hyub; Han, Ji-Hoon; Park, Chan Won; Min, Nam Ki.

Afiliación

Kim JH; Department of Nanomechatronics Engineering, Pusan National University, Busandaehak-ro 63 beon-gil 2, Geumjeong-gu, Busan 46241, Korea.
Han JH; Department of Control and Instrumentation Engineering, Korea University, Sejong-ro, Jochiwon-eup, Sejong-si 30019, Korea.
Park CW; Department of Electrical and Electronics Engineering, Kangwon National University, Gangwondaehak-gil, Chuncheon-si 24341, Korea.
Min NK; Department of Control and Instrumentation Engineering, Korea University, Sejong-ro, Jochiwon-eup, Sejong-si 30019, Korea.

Sensors (Basel) ; 20(11)2020 May 26.

Article en En | MEDLINE | ID: mdl-32466606

Palabras clave

alkali-free glass; high withstand voltage; micro-electromechanical system (MEMS); piezoresistive sensor; silicon; strain gauge

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2020 Tipo del documento: Article Pais de publicación: Suiza

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google