System for Fabrication of Large-Area Roll Molds by Step-and-Repeat Liquid Transfer Imprint Lithography.

Lim, Hyungjun; Jung, Sanghee; Ahn, Junhyoung; Choi, Kee-Bong; Kim, Geehong; Kwon, Soongeun; Lee, Jaejong

Lim, Hyungjun; Jung, Sanghee; Ahn, Junhyoung; Choi, Kee-Bong; Kim, Geehong; Kwon, Soongeun; Lee, Jaejong.

Afiliación

Lim H; Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea.
Jung S; Department of Nano-Mechatronics, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Korea.
Ahn J; Office of Nano-Convergence Technology, National NanoFab Center, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Korea.
Choi KB; Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea.
Kim G; Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea.
Kwon S; Department of Nano-Mechatronics, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, Korea.
Lee J; Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, Korea.

Materials (Basel) ; 13(8)2020 Apr 20.

Article en En | MEDLINE | ID: mdl-32325977

Palabras clave

liquid transfer imprint lithography; nanoimprint lithography; nanopattern; roll

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Materials (Basel) Año: 2020 Tipo del documento: Article Pais de publicación: Suiza

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