The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch.

Chen, Wenguo; Wang, Rui; Wang, Huiying; Kong, Dejian; Sun, Shulei

Chen, Wenguo; Wang, Rui; Wang, Huiying; Kong, Dejian; Sun, Shulei.

Afiliación

Chen W; The College of Information Engineering, Qujing Normal University, Qujing 655000, China.
Wang R; The College of Information Engineering, Qujing Normal University, Qujing 655000, China.
Wang H; The College of Information Engineering, Qujing Normal University, Qujing 655000, China.
Kong D; The College of Information Engineering, Qujing Normal University, Qujing 655000, China.
Sun S; The College of Mechanical Engineering, Guizhou Institute of Technology, Guiyang 550003, China.

Micromachines (Basel) ; 10(11)2019 Nov 18.

Article en En | MEDLINE | ID: mdl-31752181

Palabras clave

MEMS inertial switch; dynamic contact process; surface micromachining; threshold

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google

Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: Micromachines (Basel) Año: 2019 Tipo del documento: Article País de afiliación: China Pais de publicación: Suiza

Texto completo

Añadir a Mi BVS

Imprimir

XML

PubMed Links

Buscar en Google