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Calibrating lateral displacement sensitivity of AFM by stick-slip on stiff, amorphous surfaces.
Chu, Liangyong; Bus, Marcel; Korobko, Alexander V; Besseling, Nicolaas A M.
Afiliación
  • Chu L; Organic Materials and Interfaces, Department of Chemical Engineering, Delft University of Technology, van der Maasweg 9, Delft 2629 HZ, the Netherlands; Surface Technology and Tribology, Department of Mechanics of Solids, Surfaces and Systems (MS3), University of Twente, Drienerlolaan 5, Enschede 75
  • Bus M; Organic Materials and Interfaces, Department of Chemical Engineering, Delft University of Technology, van der Maasweg 9, Delft 2629 HZ, the Netherlands.
  • Korobko AV; Organic Materials and Interfaces, Department of Chemical Engineering, Delft University of Technology, van der Maasweg 9, Delft 2629 HZ, the Netherlands.
  • Besseling NAM; Organic Materials and Interfaces, Department of Chemical Engineering, Delft University of Technology, van der Maasweg 9, Delft 2629 HZ, the Netherlands. Electronic address: klaas.besseling@gmail.com.
Ultramicroscopy ; 205: 1-4, 2019 Oct.
Article en En | MEDLINE | ID: mdl-31234097
We calibrate the lateral mode AFM (LFM) by determining the position-sensitive photodetector (PSPD) signal dependency on the lateral tip displacement, which is analogous to the constant-compliance region in normal-force calibration. By stick-slip on stiff, amorphous surfaces (silica or glass), the lateral tip displacement is determined accurately using the feedback loop control of AFM system. The sufficiently high contact stiffness between the Si AFM tip and stiff, amorphous surfaces substantially reduces the error of PSPD signal dependency on the lateral tip displacement. No damage or modification of the AFM probe is involved and only a clean silicon or glass wafer is needed.
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Diagnostic_studies Idioma: En Revista: Ultramicroscopy Año: 2019 Tipo del documento: Article Pais de publicación: Países Bajos
Texto completo
Añadir a Mi BVS
Imprimir
XML
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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Tipo de estudio: Diagnostic_studies Idioma: En Revista: Ultramicroscopy Año: 2019 Tipo del documento: Article Pais de publicación: Países Bajos