Single step fabrication of Silicon resistors on SOI substrate used as Thermistors.

Rollo, Serena; Rani, Dipti; Olthuis, Wouter; Pascual García, César

Rollo, Serena; Rani, Dipti; Olthuis, Wouter; Pascual García, César.

Afiliación

Rollo S; Nano-Enabled Medicine and Cosmetics group, Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), Belvaux, Luxembourg.
Rani D; BIOS Lab on Chip Group, MESA+Institute for Nanotechnology, University of Twente, Enschede, The Netherlands.
Olthuis W; Nano-Enabled Medicine and Cosmetics group, Materials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), Belvaux, Luxembourg.
Pascual García C; BIOS Lab on Chip Group, MESA+Institute for Nanotechnology, University of Twente, Enschede, The Netherlands.

Sci Rep ; 9(1): 2835, 2019 Feb 26.

Article en En | MEDLINE | ID: mdl-30808888

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Texto completo: 1 Colección: 01-internacional Base de datos: MEDLINE Idioma: En Revista: Sci Rep Año: 2019 Tipo del documento: Article País de afiliación: Luxemburgo Pais de publicación: Reino Unido

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